Microelectronics production equipment

Noise and vibration test and measurement solutions for laboratory, in the field and test cells

Reticle stage, encoder servo acceleration & speed tuning, wafer stage, stability (grid, process), acceleration & speed control, floor vibrations, µelectronics workshop factories, medical scanners

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Reticle stage

Encoder servo acceleration & speed tuning

Wafer stage

Stability (grid, process), acceleration & speed control

Floor vibrations

µelectronics workshop factories, medical scanners

Recommended packages

Floor vibration analyzer

  • OR36 16 ch. portable Teamwork instrument
  • OCT real-time 1/N CPB octave analysis software module
  • Real-time single/double integration filters

Stepper structural dynamics and servo

  • OR38 32 ch. dynamic signal analyzer
  • FFT narrow band spectral analysis software module
  • XFT narrow band frequency response function software module
  • Advanced swept sine generator for servo analysis tests

OROS advantages

Microelectronic machines

  • Multi-channels instruments
  • High sensitivity & accuracy inputs
  • Servo analysis

Vibration monitoring for sensitive facilities

  • Portable/Mobile instruments
  • Multi-channels instruments
  • High sensitivity & accuracy inputs