Microelectronics production equipment

Noise and vibration test and measurement solutions for laboratory, in the field and test cells

Reticle stage, encoder servo acceleration & speed tuning, wafer stage, stability (grid, process), acceleration & speed control, floor vibrations, µelectronics workshop factories, medical scanners


Reticle stage

Encoder servo acceleration & speed tuning

Wafer stage

Stability (grid, process), acceleration & speed control

Floor vibration

µelectronics workshop factories, medical scanners

Recommended packages

Floor vibration analyzer

Stepper structural dynamics and servo

  • OR38 32 ch. dynamic signal analyzer
  • FFT narrow band spectral analysis software module
  • XFT narrow band frequency response function software module
  • Advanced swept sine generator for servo analysis tests

OROS advantages